Article ID Journal Published Year Pages File Type
1690463 Vacuum 2007 4 Pages PDF
Abstract

In the contribution there is presented a new computer modelling technique, which can be used in multidimensional computer simulations of plasma at low pressure. The technique is based on the fluid–particle approach and can be used in the study of the range of physical phenomena, e.g. plasma behaviour in the vicinity of substrates, probe diagnostics, plasma technology, etc. The computer model is useable for the solution of three-dimensional problems and it minimizes the restrictions arising in complicated model geometry. The algorithm has been tested during the study of plasma sheath formation in the vicinity of probes with various geometries immersed into low-temperature argon plasma. Some results of these simulations are presented in the last section.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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