| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1690469 | Vacuum | 2007 | 4 Pages |
In this article we report on results obtained using a newly developed self-consistent fully 3D Particle-In-Cell code for modelling of plasma–solid interaction.The model presented here involves a hollow cylindrical chamber opened to the plasma, with a thin cylindrical guard at the inlet and a strong external magnetic field limiting access of charged particles to the cylindrical wall. This model layout might provide more insight into processes taking place during magnetron deposition of thin films onto porous media. It is also a basis for probe diagnostics in fusion plasma research.The magnetic field is either parallel or slightly inclined with respect to the cylindrical axis. The results presented are axial and azimuthal ion current densities and cumulative distribution functions of ions impinging on the cylindrical surface for several angles of magnetic field inclination. They confirm the importance of proper alignment with magnetic field in certain geometries.Efficiency and possibilities of further extensions to the 3D model are also briefly discussed.
