Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1690505 | Vacuum | 2012 | 4 Pages |
Abstract
⺠Time resolved CSD of the titanium hydride cathodic vacuum arc plasma. ⺠Charge resolved ion velocities distribution of the plasma. ⺠Neutral gas released by cathode will affect the characteristic of the plasma.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Lei Chen, Dazhi Jin, Liang Cheng, Lei Shi, Xiaohua Tan, Wei Xiang, Jingyi Dai, Side Hu,