Article ID Journal Published Year Pages File Type
1690505 Vacuum 2012 4 Pages PDF
Abstract
► Time resolved CSD of the titanium hydride cathodic vacuum arc plasma. ► Charge resolved ion velocities distribution of the plasma. ► Neutral gas released by cathode will affect the characteristic of the plasma.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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