| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1690524 | Vacuum | 2012 | 4 Pages |
Abstract
⺠The foil thickness seemed to have decreased by beam irradiation; however, the main cause of this phenomenon remains unknown. ⺠We seek the cause of decrease in foil thickness by studying the relations between the gases released and foil thickness. ⺠The residual gas was measured by using partial pressure vacuum gauge, and the contained elements were analyzed with RBS. ⺠We found that the presence of oxygen is the main cause of decrease in foil thickness.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Yasuhiro Takeda, Toshiharu Kadono,