Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1690565 | Vacuum | 2006 | 7 Pages |
Abstract
Polyimide-like thin films were deposited by thermal degradation of polyimide with and without simultaneous activation by a glow discharge excited using an r.f. planar magnetron. The films deposited without discharge are similar in composition to conventional polyimide, whereas the deposition with plasma results in cross-linked coatings with composition typical for plasma polymers e.g. prepared by r.f. sputtering of polyimide. AFM reveals rough surface topography for the films evaporated without plasma. The application of plasma leads to very smooth plasma polymer films.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
A. Choukourov, J. Hanuš, J. Kousal, A. Grinevich, Y. Pihosh, D. Slavínská, H. Biederman,