Review: Developments in micro/nanoscale fabrication by focused ion beams

Focused ion beam (FIB) technology has become increasingly attractive for the fabrication of micro/nano structures for the purpose of the demands in industry and research. In this paper, various efforts to fabricate micro/nanoscale structure and geometrically complex structure are described, and their efficiency and structural stability are discussed. In order to fabricate such complex structures with micro/nanoscale features, the capability of the FIB is directly related to its destructive and constructive processes. It can also be used for modification and imaging in four basic modes. The fabrication processes, including both milling and deposition, are related to the precision fabrication of samples at the micro/nanoscale. By taking into account material processing rates, surface morphologies with nanoscale effects can be explained in detail. Finally, very recent developments using FIB will be reviewed.

► This paper reviews extensive works in micro/nanoscale FIB fabrication. ► The basic four functions of FIB and their mechanisms were explained and introduced. ► Degree of precision, yield, and nanoscale phenomena in FIB fabrication were reviewed. ► Ion induced damages from FIB were taken into consideration and discussed. ► Various applications and advanced fabrication methods in FIB were introduced.