Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1690694 | Vacuum | 2006 | 4 Pages |
Abstract
An innovative regulation algorithm that allows to stabilise quickly the pressure in the range 1 Pa–7 kPa in a leaky chamber using a commercially available pressure regulator designed for atmospheric pressure range has been developed. The algorithm has been implemented on a nonrotating digital piston gauge allowing automatic calibration of pressure sensors. This algorithm could be used helpfully to generate starting pressures for dynamic expansion systems.
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Authors
Christian Wüthrich, Thimo Sauter,