Article ID Journal Published Year Pages File Type
1690694 Vacuum 2006 4 Pages PDF
Abstract

An innovative regulation algorithm that allows to stabilise quickly the pressure in the range 1 Pa–7 kPa in a leaky chamber using a commercially available pressure regulator designed for atmospheric pressure range has been developed. The algorithm has been implemented on a nonrotating digital piston gauge allowing automatic calibration of pressure sensors. This algorithm could be used helpfully to generate starting pressures for dynamic expansion systems.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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