Article ID Journal Published Year Pages File Type
1690706 Vacuum 2012 4 Pages PDF
Abstract

This paper describes computational simulations of the propagation of a magnetised plasma to inner parts of porous solids or cavities. The geometry of such a problem requires generally three-dimensional simulations due to lack of symmetry. We propose a hybrid method to overcome limitations of commonly used particle and fluid models. The hybrid method combines particle and fluid parts in an iterative manner to obtain results in a short time preserving information about individual particles.The hybrid model is applied to a study of ion propagation to a cylindrical hole in a conductive solid. The influence of a magnetic field and its orientation is discussed. The presence of the magnetic field enhances the flux of ions to the hole; the influence of voltage bias on the substrate is highly important.

► Hybrid model is a competitive alternative to particle models. ► Magnetic field improves the ion propagation to inner parts of a cavity. ► Negative bias changes the ion flux distribution to walls of cavity.

Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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