| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1690715 | Vacuum | 2012 | 6 Pages |
Abstract
⺠Critical radius of tube characterizes the size of inner surface modification by PBII. ⺠Temporal sheath dynamics demonstrated the effective range of process parameters. ⺠Plasma density and steady pulse voltage were two main effect factors. ⺠Optimum process parameters bounded by ion implantation dose and processing time. ⺠Critical radius of tube was determined in grid-enhanced PBII technique.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Y. Li, B.C. Zheng, M.K. Lei,