| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1690719 | Vacuum | 2012 | 5 Pages |
Abstract
⺠The novel TiAlN/AlON nanomultilayers were produced by reactive magnetron sputtering. ⺠The amorphous AlON layers were crystallized and grow epitaxially with TiAlN layers. ⺠The maximum hardness and elastic modulus, respectively, reach 36.2 GPa and 385.6 GPa.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Wei Li, Ping Liu, Juntao Wang, Fengcang Ma, Xinkuan Liu, Xiaohong Chen, Daihua He,