Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1690798 | Vacuum | 2006 | 4 Pages |
Abstract
Transparent conductive amorphous Cd-In-Sb-O thin films were deposited on a flexible polyethylene naphthalate film by rf magnetron sputtering at room temperature. The large Hall mobility of â¼26Â cm2Â Vâ1Â sâ1 was observed on the films with carrier density >1020Â cmâ3. The carrier density varied from the order of 1020 to 1017Â cmâ3 with increasing the oxygen partial pressure. The Hall mobility reached up to â¼17Â cm2Â Vâ1Â sâ1, even at carrier density of â¼1017Â cmâ3. Flexible transparent filed-effect transistor was also fabricated using the Cd-In-Sb-O thin films as a channel layer and the device performance was investigated. The device exhibited a field-effect mobility of â¼0.45Â cm2Â Vâ1Â sâ1 and an on-off ratio of â¼102 at room temperature.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Hiroyuki Tetsuka, Yue Jin Shan, Keitaro Tezuka, Hideo Imoto,