| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1690818 | Vacuum | 2011 | 9 Pages |
Abstract
⺠Microstructure of Ir coating was affected by bias voltage and gas pressure. ⺠Bias voltages had a significant impact on the orientation of the coating. ⺠The increasing bias voltages caused high substrate temperature and deposition rate. ⺠Morphology and orientation of the coating were changed due to the coating thickness.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Wangping Wu, Zhaofeng Chen, Xin Lin, Binbin Li, Xiangna Cong,