Article ID Journal Published Year Pages File Type
1690898 Vacuum 2011 4 Pages PDF
Abstract
► We studied different filament ion sources. ► We proposed a method for simulation of the filament ion source performance. ► In addition we introduced a novel filament ion source with higher reliability. ► The simulation shows a considerable improvement in the performance. ► The developed approach allows a proper theoretical method to gain efficient magnetic field in the filament ion source; which can lower the cost and decrease design and fabrication time.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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