| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1690902 | Vacuum | 2011 | 4 Pages |
Abstract
⺠The electron beam skirt phenomenon in ESEM under gas environment is studied. ⺠The use of gas with high atomic number induces some uncertainties in the microanalysis results. ⺠The use of a gas with low atomic number such as Helium, leads to accurate results. ⺠A new explanation related to the gas ionization is given. ⺠Equation given rs is not suitable.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
L. Khouchaf, C. Mathieu, Abd-Ed-Daïm Kadoun,