| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1691006 | Vacuum | 2011 | 6 Pages |
Three different configurations of magnetic traps were set up by changing the number of central magnets in a Triode Magnetron Sputtering system, where the anode consists of a grid positioned at a distance from an aluminum target on the cathode. The grid and the wall chamber are grounded and the plasma is formed in the space between the target and the grid. The current–voltage (I–V) characteristics of argon discharges were obtained, for each magnetic configuration and for various grid–target distances. It is noticed that the magnetron efficiency strongly depends on the inter-electrode distance and magnetic trap configuration. The configuration with the highest unbalance coefficient has I–V curves that differ substantially from the usual relation observed in conventional magnetron discharges. In this case the usual I–V fitting curves of magnetron mode of operation are not appropriate to describe the electrical characteristics of the discharge.
Research highlights► The TMS system allows the increase of magnetron efficiency. ► The I–V relation depends on the configuration of magnetic field. ► The loss of high energy electrons determines the magnetron efficiency.
