| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1691007 | Vacuum | 2011 | 7 Pages |
Abstract
⺠Model is proposed to analyze effect of AC signal on the isolated surface in contact with plasma. ⺠Pulse modulation of collector voltage for reactor with BPD has evident advantages. ⺠Experiment with probe-simulator allows estimation of IDF on isolated surface.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
E.G. Shustin, N.V. Isaev, I.L. Klykov, V.V. Peskov,