Article ID Journal Published Year Pages File Type
1691031 Vacuum 2009 4 Pages PDF
Abstract
Several titanium (Ti) hydride washers containing different amounts of both TiN and an oxide compound (Ox) are tested for the source of hydrogen (H+) plasmas. According to the different-looking surfaces of the washers of Ti hydride, considerable change in the required discharge voltage is observed. Slightly larger probe currents are also measured from plasmas produced with the washers having the smallest amounts of TiN and Ox, which suggests the existence of more H+ ions in the formed plasmas. Once apparent grain coarsening appears on the surface of Ti hydride washers at the temperature around 950°C, no successful electric discharge occurred.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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