| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1691037 | Vacuum | 2009 | 5 Pages |
Abstract
Adhesion strength between these thin films and SUS302 substrate and shear stress were measured by SAICAS. Both of the adhesion strength and shear stress of polymer thin films prepared with r.f. sputtering (without magnetron) were slightly higher than those prepared by magnetron sputtering systems.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Satoru Iwamori, Norihiko Hasegawa, Akihiro Uemura, Tomoya Tanabe, Itsuo Nishiyama,