Analytical differential cross section of electron elastically scattered by solid targets in the energy range up to 100Â keV

In this paper, we propose a new approach to determine the adjustable parameters of differential elastic cross-section of Bentabet et al. approximation. The resultant approximation is an analytical expression that can be used to study the interaction of electron beams with solid targets. This approximation is applied for the energy range up to 100 keV, to calculate some quantities such as: the mean penetration depths, the mean number of wide angle collisions and the backscattering coefficient (BSC) of Al, Cu, Ag and Au semi-infinite solid targets. BSC was calculated by using both the Monte Carlo method and the Vicanek and Urbassek analytical model. The obtained results are compared with the experiment and good agreement is remarked.