Leak calibration by comparison with reference standard leaks

A study of the calibration of leaks by comparison with reference standard leaks calibrated at a National Metrology Laboratory is presented. The simplicity and efficiency of the method make it suitable for calibrations of leaks carried out at the industrial level. A commercial leak tester equipped with a mass spectrometer tuned to helium is used for the comparison. The main origins of uncertainties and their contributions to the expanded uncertainty are presented. In particular, discussion is devoted to the long-term stability, shift, or depletion of the reference standard leaks and the resulting impact on the expanded uncertainty. Results of application of the procedure for calibration of a leak of similar metrological characteristics to the reference standard leaks are also presented.