Article ID Journal Published Year Pages File Type
1691181 Vacuum 2008 6 Pages PDF
Abstract
Furthermore, the rotating mechanism of a yoke magnet could be separated from the cooling water and the target could be cooled more effectively because the water cooling unit was attached not only to the outer area of target, but also to the tilted space of the center magnet.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Preview
Improved wide erosion nickel magnetron sputtering using an eccentrically rotating tilted center magnet
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