Effect of substrate temperature on the physical properties of In2O3:Mo films: Prepared by an activated reactive evaporation

Transparent and high conductive molybdenum doped indium oxide (IMO) thin films have been deposited on glass substrates by activated reactive evaporation. The effect of substrate temperature on the structure, surface morphology, electrical, optical and photoluminescence properties of these films were systematically examined and it was found that crystallinity and growth orientation of the films were significantly influenced by substrate temperature. In addition the films exhibited a low electrical resistivity of 5.2 × 10−4 Ω cm with an optical transmittance 90% in the visible region of the solar spectrum at a substrate temperature of 573 K. Intensive blue PL bands at 415 and 440 nm were observed in the photoluminescence spectrum at room temperature.