| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1691302 | Vacuum | 2008 | 5 Pages |
Abstract
The electrophysical properties of the obtained layers and systems (ultrathin dielectric layer, silicon) were characterized by electrical methods. Results of ellipsometric, XPS and ULE-SIMS measurements are also presented and discussed.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
T. Bieniek, R.B. Beck, A. Jakubowski,