Article ID Journal Published Year Pages File Type
1691311 Vacuum 2008 4 Pages PDF
Abstract

Investigations of ion–molecule reactions were performed for methane–carbon tetrafluoride mixtures of different compositions. Concentration of methane in these mixtures ranged from 10% to 90% (at 10% increment) and total mixture pressure was fixed at 13.3 Pa. Measurements were made using a quadrupole mass spectrometer with a high-pressure ion source. Primary ions CH4+, F+, CF+ and CF3+ were produced by electrons with energy of 300 eV. Secondary ions CH5+, C2H3+, C2H4+, C2H5+, C2H7+ and CF3+ were observed as the result of ion–molecule reactions.The influence of repeller potential on ion–molecule reactions efficiency was examined.

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