| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1691408 | Vacuum | 2008 | 4 Pages |
Abstract
In the new emerging markets of flat panel display, photovoltaic and optical coating applications, the introduction of cylindrical rotating magnetron technology can accommodate the needs for faster, better and cheaper coating processes. Recent developments of hardware (compact end blocks, etc.) and target materials for rotatable magnetron technology offer a total solution to the innovative thin film applications.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Steven Matthews, Wilmert De Bosscher, Anja Blondeel, John Van Holsbeke, Hilde Delrue,