Article ID Journal Published Year Pages File Type
1691467 Vacuum 2007 4 Pages PDF
Abstract

For conventional (single-flow) turbomolecular pumps (TPs) the central disc area of the inlet side of the compressor turbine is blind for pumping and may be utilized otherwise. The design feature of the new Ring TP displays a central opening of the TP all along the axis, where care is taken to prevent coupling between the vacuum areas on both sides of the compressor turbine. The axial opening can be used independently, e.g. for free central access to the high vacuum side through the TP.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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