Article ID Journal Published Year Pages File Type
1691505 Vacuum 2007 6 Pages PDF
Abstract

National Measurements Institutes calibrate vacuum pressure sensors a few gauges at a time in a time-consuming fashion, resulting in an accurate calibration with small uncertainty estimates. A manufacturer produces a comparatively large number of sensors a day which must be economically calibrated. Here, we investigate a procedure for rapid calibration of combination vacuum gauges while following as closely as possible the relevant norms published by the international standards organizations. The investigated procedure increases the uncertainty estimate by up to 10%, but the gauges are still within common accuracies (<15% of reading in the range of 1×10−6 to 1×10−2 hPa) for this type of measurement instrument.

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Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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