Article ID Journal Published Year Pages File Type
1691656 Vacuum 2008 5 Pages PDF
Abstract
The principles of non-destructive, non-contact characterization of coatings by means of photothermal measuring techniques are briefly explained. A method of quantitative interpretation is presented, which relies on the relative extrema of the calibrated thermal wave phase lags measured as a function of the heating modulation frequency for coatings deposited by reactive magnetron sputtering. The application potential of this interpretation method with respect to the on-line control of coating deposition processes is discussed.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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