Article ID Journal Published Year Pages File Type
1691658 Vacuum 2008 5 Pages PDF
Abstract

A d.c. reactive magnetron sputtering technique was used to deposit (Ti,Si,Al)N coatings onto WC–Co cutting tools. The microstructure of the coatings was analysed using X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM) measurement. Before the cutting experiments, the XRD results revealed a structure indexed to an fcc TiN. The results obtained by the XRD tests, with detector variation in asymmetric mode (rocking curves) showed a decrease in the quality of the fiber texture in the (111) grains with the change on deposition chamber geometry (two magnetrons in place of four magnetrons). Cross-sectional HRTEM images of the (Ti,Al)N sample showed grains with a diameter between 16 and 30 nm, while for the (Ti,Si,Al)N samples grains with a diameter between 6 and 10 nm were observed. Furthermore, through the visualization of bright field images it was possible to discern a columnar structure. For samples prepared at high deposition rates (2 μm/h), HRTEM micrographs revealed the formation of the multilayer stacking of (Ti,Si)N/(Ti,Al)N.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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