| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1691697 | Vacuum | 2008 | 5 Pages |
Abstract
This paper gives a short summary of a new survey about experimental and calculated sputtering yields. A comparison of both data sets show a reasonable agreement in most cases.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
W. Eckstein,