Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1691710 | Vacuum | 2006 | 7 Pages |
Emission spectroscopy measurements of Balmer-β and Balmer-γ line profiles are carried out to study their line shapes and line intensities as a function of discharge parameters such as fill pressure (3–7 mbar) and input power (200–400 W). A technique based on determining the relative intensities of neutral atomic hydrogen emission lines is used to evaluate the electron temperature, whereas the electron density is extracted from the Stark broadening (FWHM) of the Hβ emission profile. It is found that both the emission intensity and the broadening of the Balmer-β and Balmer-γ lines exhibit significant dependence on the fill pressure in the same manner. However, both the emission intensity and broadening of the Hβ line exhibit a weak dependence on input power in contrast to the Hγ emission line. Based on optical measurements reported here, plasma discharge parameters can be selected to optimize the electron temperature and density.