Particularities of condensation of atoms with increased kinetic energy

Novel universal method for measurement of the condensation coefficient α is developed. Using this method, noticeable difference between measured (α≈0.8) and expected (α≈1) values of the condensation coefficient for sputtered Cr atoms was revealed for the first time. The effect is assumed to be a result of considerable elevation of the surface temperature during atomic condensation induced by the energy delivered to the condensation surface by sputtered atoms and from the plasma.