Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1691767 | Vacuum | 2006 | 4 Pages |
Abstract
Novel universal method for measurement of the condensation coefficient α is developed. Using this method, noticeable difference between measured (αâ0.8) and expected (αâ1) values of the condensation coefficient for sputtered Cr atoms was revealed for the first time. The effect is assumed to be a result of considerable elevation of the surface temperature during atomic condensation induced by the energy delivered to the condensation surface by sputtered atoms and from the plasma.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Leonid R. Shaginyan, Jeon Geon Han, Nikolay V. Britun,