Silicon doped SnO2 films for liquid petroleum gas sensor

Silicon doped SnO2 films were synthesized by sputtering SnO2 layer onto glass substrates with appropriate amount of silicon sputtered onto them. The bilayer structures were subjected to rapid thermal annealing for the incorporation of Si in SnO2 matrix. The films thus obtained were characterized by measuring optical and microstructural properties. Liquid petroleum gas (LPG) sensing properties were also investigated. FTIR and Raman studies were also carried out on these films, both, before and after LPG exposure.