Nanosecond pulsed laser micromachining of PMMA-based microfluidic channels

This paper reports an investigation into the effects of nanosecond laser processing parameters on the geometry of microchannels fabricated from polymethylmethacrylate (PMMA). The Nd:YAG solid-state pulsed laser has a wavelength of 1064 nm and a measured maximum power of 4.15 W. The laser processing parameters are varied in a scanning speed range of 400-800 pulses/mm, a pulse frequency range of 5-11 Hz, a Q-switch delay time range of 170-180 μs. Main effects plots and microchannel images are utilized to identify the effects of the process parameters for improving material removal rate and surface quality simultaneously for laser micromachining of microchannels in PMMA polymer. It is observed that channel width and depth decreased linearly with increasing Q-switch delay time (hence average power) and increased non-linearly with higher scanning rates and not much affected by the increase in pulse frequency.