| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1697594 | Journal of Manufacturing Systems | 2013 | 10 Pages |
Abstract
⺠Extensive review and comparison of existing run-to-run (R2R) process control algorithms. ⺠Detailed introduction of a real semiconductor manufacturing process. ⺠Derivation of a batch-based run-to-run control strategy for multistage manufacturing processes. ⺠Extensive performance study of the proposed control strategy.
Related Topics
Physical Sciences and Engineering
Engineering
Control and Systems Engineering
Authors
Kai Han, Kaibo Wang,