Dynamic and Static Analysis of the Key Vertical Parts of a Large Scale Ultra-precision Optical Aspherical Machine Tool

In this paper, a finite element model is built up to investigate the static and dynamic characteristics of the key vertical parts of a large scale ultra-precision optical aspherical machine. The spring-damper units of moving joint surfaces are applied in the finite element analysis. The analysis of static characteristics shows that the stiffness of grinding point is much smaller in other directions than that in vertical direction. When the ram is in the highest and lowest positions, the first-order natural frequencies of the vertical parts are 85.6 Hz and 84.6 Hz, respectively, more than twice times of the maximum spindle speed.