Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers

The static and dynamic behavior of regular and irregular single and assembled micro cantilever probes (ACPs) have been analysed. Various points and distributed loadings are considered. Since the applications of Micro Electro Mechanical Systems (MEMS) are not limited to an especial boundary condition, two semi-analytical approaches, named the generalized differential quadrature and generalized differential quadrature element methods (GDQM and GDQEM) have been used for regular and irregular MEMS, respectively. With less computational cost, it has been clearly demonstrated that these methods are more accurate than common numerical methods such as the Finite Element Method (FEM). For probable cases, proposed approaches have been validated with the exact Green’s function method. Then, considering the various composite lamination configurations (angle/cross), the effects of the electromechanical loading on the nano steering devices have been introduced. At the end, the solution challenges for scanning (sensing) the especial micro and nano profiles has been discussed and as a general case, a nano gear has been studied. The phase plane approach shows the probability of solution for various configurations and suggests the best for more stability.