Study of parametric oscillation of an electrostatically actuated microbeam using variational iteration method

This paper deals with the study of parametric oscillation of an electrostatically actuated microbeam using variational iteration method. The paper considers a micro-beam suspended between two conductive micro-plates, subjected to a same actuation voltage. The nonlinear governing differential equation of motion about static equilibrium position using calculus of variation theory and Taylor series expansion has been linearized and implementing a Galerkin based reduced order model a Mathieu type equation has been obtained. By improving variational iteration method combining with method of strained parameters transition curves, separating stable from unstable regions have been obtained. The results of variational iteration method, perturbation and direct numerical integration methods for some cases selected from different regions (stable and unstable regions) have been compared.