| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1706295 | Applied Mathematical Modelling | 2011 | 9 Pages |
Abstract
In this paper, some types of sensing and actuating mechanisms for MEMS applications proposed and designed, the governing equation of models derived and solved with numerical and analytical methods. Results in a good agreement of other works and various parameters which affect on their operation investigated.
Keywords
Related Topics
Physical Sciences and Engineering
Engineering
Computational Mechanics
Authors
Shahriar Kouravand,