Dynamic modeling of a high-precision self-moving stage with various frictional models

The piezoelectric actuator (PA) has been used for precision positioning from micro-meter down to nano-meter scale. In this paper, the frictional force is first described by the LuGre model and Leuven model, which allow accurate dynamic modeling both in the sliding and the presliding regimes without using switching functions. The hysteresis frictional parameters controlling the restoring force amplitude and the shape of hysteresis loop are investigated. Sequentially, the two frictional models are employed in the self-moving stage for high-precision positioning under different applied voltages. From the numerical results in the pre-sliding regime, it is shown that the hysteresis frictional force has critical influence on the final position of the micro- and nano-meter positioning.