Article ID Journal Published Year Pages File Type
1759083 Ultrasonics 2012 6 Pages PDF
Abstract
► ZnO guiding layer with nanorods grown on a quartz substrate is a novel structure for fluid sensor appliation. ► Sensors use one port resonator element. ► Optimum length of ZnO nanorod arrays increases the sensitivity of flow rate. ► Optimum thickness of ZnO films contributes a linear response between the flow rate and the return loss.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Acoustics and Ultrasonics
Authors
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