Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1759083 | Ultrasonics | 2012 | 6 Pages |
Abstract
⺠ZnO guiding layer with nanorods grown on a quartz substrate is a novel structure for fluid sensor appliation. ⺠Sensors use one port resonator element. ⺠Optimum length of ZnO nanorod arrays increases the sensitivity of flow rate. ⺠Optimum thickness of ZnO films contributes a linear response between the flow rate and the return loss.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Acoustics and Ultrasonics
Authors
Walter Water, Shih-En Chen, Teen-Hang Meen, Liang-Wen Ji,