3-D airborne ultrasound synthetic aperture imaging based on capacitive micromachined ultrasonic transducers

In this paper, we present an airborne 3-D volumetric imaging system based on capacitive micromachined ultrasonic transducers (CMUTs). For this purpose we fabricated 89-kHz CMUTs where each CMUT is made of a circular single-crystal silicon plate with a radius of 1 mm and a thickness of 20 μm, which is actuated by electrostatic force through a 20-μm vacuum gap. The measured transmit sensitivity at 300-V DC bias is 14.6 Pa/V and 24.2 Pa/V, when excited by a 30-cycle burst and a continuous wave, respectively. The measured receive sensitivity at 300-V DC bias is 16.6 mV/Pa (−35.6 dB re 1 V/Pa) for a 30-cycle burst. A 26 × 26 2-D array was implemented by mechanical scanning a co-located transmitter and receiver using the classic synthetic aperture (CSA) method. The measurement of a 1.6λ-size target at a distance of 500 mm presented a lateral resolution of 3.17° and also showed good agreement with the theoretical point spread function. The 3-D imaging of two plates at a distance of 350 mm and 400 mm was constructed to exhibit the capability of the imaging system. This study experimentally demonstrates that a 2-D CMUT array can be used for practical 3-D imaging applications in air, such as a human-machine interface.