Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1759210 | Ultrasonics | 2013 | 4 Pages |
Abstract
⺠LFE bulk acoustic wave on thickness-shear mode is excited by interdigital electrodes. ⺠The effective lateral exciting electric field direction of (yxl)88° LiTaO3 plate is 0°. ⺠(yxl)88° LiTaO3 bulk acoustic wave sensors with interdigital electrodes are designed. ⺠The sensors with interdigital electrodes show superior electrically sensitivity.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Acoustics and Ultrasonics
Authors
Tingfeng Ma, Ji Wang, Jianke Du, Lili Yuan, Zhenghua Qian, Zhitian Zhang, Chao Zhang,