Article ID Journal Published Year Pages File Type
1759210 Ultrasonics 2013 4 Pages PDF
Abstract
► LFE bulk acoustic wave on thickness-shear mode is excited by interdigital electrodes. ► The effective lateral exciting electric field direction of (yxl)88° LiTaO3 plate is 0°. ► (yxl)88° LiTaO3 bulk acoustic wave sensors with interdigital electrodes are designed. ► The sensors with interdigital electrodes show superior electrically sensitivity.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Acoustics and Ultrasonics
Authors
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