Evaluation of the local homogeneity fluctuation of sinter of the small chip size MLCCs by means of mid-infrared spectroscopy

Vibration bands of dielectric ceramics appear at a mid-infrared (MIR) and those position and shape are changed owing to change environment of crystal lattice. Therefore, micro-focus MIR spectroscopy is a one of useful tool to evaluate very small size capacitor (e.g. smaller than 0.5 mm in chip size). Very small size multi-layer capacitor: MLCC are one of very important device to produce high quality electrical products such as cell phone, etc. Quality and reliability of MLCC are corresponding to not only average dielectric properties but also local fluctuation of them. Furthermore, local fluctuation of dielectric properties of MLCC could evaluate with MIR spectroscopy. It is possible to obtain a satisfied MIR spectrum from small size samples performed by a micro-focus spectrometer combined with synchrotron radiation as a high luminance light source at beam line BL43IR of SPring-8. From the above result, it is possible to evaluate the degree of homogeneity by comparing the shape change of Ti–O peak on IR spectra.