Article ID Journal Published Year Pages File Type
1785086 Infrared Physics & Technology 2006 4 Pages PDF
Abstract
A purpose-build infrared spectroscopic ellipsometer is presented that enables to investigate sample areas of less than 1 mm2 with monolayer sensitivity. This sensitivity is achieved for films on metallic as well as on semiconducting substrates. Measurement principle and performance of the instrument are discussed on selected examples and an outline of the currently performed upgrading of the set-up is given.
Keywords
Related Topics
Physical Sciences and Engineering Physics and Astronomy Atomic and Molecular Physics, and Optics
Preview
Microfocus-infrared synchrotron ellipsometer for mapping of ultra thin films
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