Cost-effective infrared thermography protocol for 40 μm spatial resolution quantitative microelectronic imaging

In this article, we will show that the absolute temperature of electrical components under test can be measured with an infrared camera. An easy and cost-effective modification of the optical set-up and a software correction of the artefacts induced by the modification of the aperture of the objective allow to improve the spatial resolution. Calibrations with a Peltier system allow to obtain quantitative measurements. Consequently, it becomes easy to obtain a mapping of the absolute temperature of the surface of an integrated circuit from its infrared radiation, independently of its surface emissivity with a spatial resolution better than 40 μm.