Article ID Journal Published Year Pages File Type
1789993 Journal of Crystal Growth 2015 31 Pages PDF
Abstract
A 2D finite element method is employed to compute electromagnetic field as well as volumetric heat generation in an oxide Czochralski crystal growth system considering different shapes of metal crucible and different configurations of induction coil. The results show undeniable roles of crucible corner shape and setup of the RF-coil under the crucible in producing desirable heat pattern and avoiding common issues in the CZ growth systems.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
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