Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1791470 | Journal of Crystal Growth | 2012 | 5 Pages |
Abstract
⺠We performed polytype-selective growth of 3C-SiC and 6H-SiC by controlling supersaturation. ⺠The growth rates of 3C-SiC and 6H-SiC had different dependences on supersaturation. ⺠3C-SiC grew covering the 6H-SiC seeds completely at a high supersaturation. ⺠Our kinetics-based polytype control is quite different from conventional technique.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Kazuaki Seki, Alexander Alexander, Shigeta Kozawa, Shunta Harada, Toru Ujihara, Yoshikazu Takeda,