Dielectric, ferroelectric and piezoelectric properties of 100-oriented Pb0.4Sr0.6TiO3 thin film sputtered on LaNiO3 electrode

Pb0.4Sr0.6TiO3/LaNiO3 (PST/LNO) thin film with a perfect (100) orientation was deposited on SiO2/Si substrate by magnetron sputtering method. Both Pt and LNO top electrodes have been prepared on this film to investigate the electrical properties. The dielectric constant and piezoelectric coefficient significantly increase while the average coercive field is strongly lowered when LNO is used as the top electrode. A large tunability of 77% (@300 kV/cm) and low loss factor of 2.85% were obtained. Also, a maximum and remnant piezoelectric coefficients (d33max.eff. and d33rem.eff.) values of 90 pm/V and 47 pm/V were observed. These measured properties indicate that the PST thin film is a multi-functional material, which is a promising candidate for piezoelectric applications and for tunability devices.

► Perfect (100)-oriented Pb0.4Sr0.6TiO3 thin film was fabricated by sputtering method. ► Piezoelectric property of PST thin film was firstly investigated. ► New evidence testifies that LNO electrode is better than Pt electrode by PST firstly. ► Good tunability and d33 prove that PST is a multi-functional material for IC.