| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1791696 | Journal of Crystal Growth | 2012 | 4 Pages |
Abstract
⺠This paper investigates the MOVPE growth of semipolar (112¯2) AlN. ⺠The (112¯2) crystal orientation could be isolated through variation of V/III ratio. ⺠Crack free surfaces have been achieved. ⺠(112¯2) AlN layer thicknesses larger than 1μm have been realized.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
J. Stellmach, M. Frentrup, F. Mehnke, M. Pristovsek, T. Wernicke, M. Kneissl,